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How Can We Lower the Power Consumption of Gas Sensors? There is a growing demand for low-power, high-density gas sensor arrays that can overcome problems relative to high power consumption. Low power consumption is a prerequisite for any type of sensor system to operate at optimum efficiency. Focused on fabrication-friendly microelectromechanical systems (MEMS) and other areas of sensor technology, MEMS and Nanotechnology for Gas Sensors explores the distinct advantages of using MEMS in low power consumption, and provides extensive coverage of the MEMS/nanotechnology platform for gas sensor applications. This book outlines the microfabrication technology needed to fabricate a gas sensor on a MEMS platform. It discusses semiconductors, graphene, nanocrystalline ZnO-based microfabricated sensors, and nanostructures for volatile organic compounds. It also includes performance parameters for the state of the art of sensors, and the applications of MEMS and nanotechnology in different areas relevant to the sensor domain. In addition, the book includes: An introduction to MEMS for MEMS materials, and a historical background of MEMS A concept for cleanroom technology The substrate materials used for MEMS Two types of deposition techniques, including chemical vapour deposition (CVD) The properties and types of photoresists, and the photolithographic processes Different micromachining techniques for the gas sensor platform, and bulk and surface micromachining The design issues of a microheater for MEMS-based sensors The synthesis technique of a nanocrystalline metal oxide layer A detailed review about graphene; its different deposition techniques; and its important electronic, electrical, and mechanical properties with its application as a gas sensor Low-cost, low-temperature synthesis techniques An explanation of volatile organic compound (VOC) detection and how relative humidity affects the sensing parameters MEMS and Nanotechnology for Gas Sensors provides a broad overview of current, emerging, and possible future MEMS applications. MEMS technology can be applied in the automotive, consumer, industrial, and biotechnology domains.
This book covers the whole range of gas sensing aspects starting from basics, synthesis, processing, characterization, and application developments. All sub-topics within the domain of gas sensors such as active materials, novel nanomaterials, working mechanisms, fabrication techniques, computational approach, and development of microsensors, and latest advancements such as the Internet of Things (IoT) in gas sensors, and nanogenerators, are explained as well. Related manufacturing sections and proposed direction of future research are also reviewed. Features: Covers detailed state-of-the-art specific chemiresistive sensing materials. Presents novel nanomaterial platforms and concepts for resistive gas sensing. Reviews pertinent aspects of smart sensors and IoT sensing. Explains nanotechnology-enabled experimental findings, and future directions of smart gas sensing technology. Explores implication of latest advancements such as IoT in gas sensors, and nanogenerators. This book is aimed at academic researchers and professionals in sensors and actuators, nanotechnology, and materials science.
Gas sensor technology has advanced remarkably during past few decades and has become one of the indispensable technologies for modern society. Varieties of gas sensors are commercially available and, using innovative ideas, efforts are being made to develop gas sensors of next generation having very small size with very low power consumption. The ultimate model for this is probably given by sensory organs of our own body, which are implanted finely and work well with a very modest amount of energy. In order to achieve this goal, it is essential that various aspects of gas sensors are seriously considered. These include understanding of gas sensing mechanisms, development of new materials and methods to synthesise them into selective sensors, innovations in nanostructured materials, measurement methods, microfabrication of sensors, exploring intelligent sensing system, etc. This book examines these issues pertaining to chemiresistive gas sensors.
Semiconductor Gas Sensors, Second Edition, summarizes recent research on basic principles, new materials and emerging technologies in this essential field. Chapters cover the foundation of the underlying principles and sensing mechanisms of gas sensors, include expanded content on gas sensing characteristics, such as response, sensitivity and cross-sensitivity, present an overview of the nanomaterials utilized for gas sensing, and review the latest applications for semiconductor gas sensors, including environmental monitoring, indoor monitoring, medical applications, CMOS integration and chemical warfare agents. This second edition has been completely updated, thus ensuring it reflects current literature and the latest materials systems and applications. Includes an overview of key applications, with new chapters on indoor monitoring and medical applications Reviews developments in gas sensors and sensing methods, including an expanded section on gas sensor theory Discusses the use of nanomaterials in gas sensing, with new chapters on single-layer graphene sensors, graphene oxide sensors, printed sensors, and much more
There were two reasons that induced me to plan and to organize this book, the first was the lack of a text entirely devoted to the subject of gas sensors, notwithstanding some books devoted to the various kind of chemical sensors have recently been published. The second reason was the need of introducing the basic topics of gas detection mechanisms to a growing number of researchers active in research and development laboratories of industries and uni versities. The field of chemical sensors is indeed in fast and consistent growth, as it is proved by the increased number of participants to the congresses that were recently held on this subject, namely the Third Meeting on Chemical Sensors (September 24 - 26, 1990, Cleveland), Transducers' 91 (June 24 - 27, 1991, S. Francisco) and EUROSENSORS V (September 30 - October 3, 1991, Rome). Therefore, this book is mainly intended as a reference text for researchers with a MS degree in physics, chemistry and electrical engineering; it reports the last progresses in the R. & D. and in the technology of gas sensors. I choose to deal specifically with the topic of gas sensors because these devices show a very large number of applications in the domestic and industrial field and they are characterized by a great effort of research and development.
Monitoring hazardous gases is highly complex, yet critical to semiconductor manufacturing. This book includes excerpts from codes and standards relevant to the industry, including the latest editions of model fire codes. This guide provides the basics to successfully comply with code requirements. The guidelines in this book go beyond minimum design standards to ensure that best industry practices are employed to address the many safety, environmental and economic concerns of hazardous occupancy facilities. System certification, redundancy and integration of gas sensors into a monitoring, control and alarm system are discussed. This is a field-guide reference. It is spiral-bound for easier ""benchtop"" access to the information you need while setting up your gas monitoring systems. It is valuable to everyone involved in handling hazardous gases.
The second edition of this book focuses on the synthesis, design, and application of semiconducting metal oxides as gas sensing materials, including the gas sensing mechanism, and modification methods for sensing materials, while also providing a comprehensive introduction to semiconductor gas sensing devices. As an essential part of IoT (Internet of things), gas sensors have shown great significance and promising prospects. Therefore, studies on functional mesoporous metal oxides, one of the most important gas sensing materials based on their unique Knudsen diffusion behavior and tailored pore structure, have increasingly attracted attention from various disciplines. The book offers a valuable reference guide to metal oxide gas sensing materials for undergraduate and graduate students alike. It will also benefit all researchers who are involved in synthesis and gas sensing of metal oxides nanomaterials with relevant frontier theories and concepts. Engineers working on research and development of semiconductor gas sensors will also find some new ideas for sensor design.
This book focuses on the applications of nanomaterials in the fabrication of gas sensors. It covers recent developments of different materials used to design gas sensors, such as conducting polymers, semiconductors, as well as layered and nanosized materials. The widespread applications of various gas sensors for the detection of toxic gases are also discussed. The book provides a concise but thorough coverage of nanomaterials applications and utilization in gas sensors. In addition, it overviews recent developments in and the fabrication of gas sensors and their attributes for a broad audience, including beginners, graduate students, and specialists in both academic and industrial sectors.
An overview of the principles & current technology of the main sensor types used for flammable gas detection, oxygen monitoring in combustion & car-exhaust control. Also includes toxic gas monitoring. A companion volume to Techniques & Mechanisms in Gas Sensing.